波谱学杂志 ›› 2023, Vol. 40 ›› Issue (1): 92-99.doi: 10.11938/cjmr20223018

• 磁共振仪器与技术专栏 • 上一篇    下一篇

基于开路谐振环的电子自旋共振系统设计与表征

骆培文1,汪伦2,吴喆1,张文旭2,*()   

  1. 1.电子科技大学 物理学院,四川 成都 611731
    2.电子薄膜与集成器件国家重点实验室,电子科技大学,四川 成都 611731
  • 收稿日期:2022-08-29 出版日期:2023-03-05 在线发表日期:2022-10-13
  • 通讯作者: 张文旭 E-mail:xwzhang@uestc.edu.cn.
  • 基金资助:
    四川省科技厅基金项目(2020YJ0266)

The Design and Characterization of Electron Spin Resonance Spectrometer Based on Double Split Ring Resonator

LUO Peiwen1,WANG Lun2,WU Zhe1,ZHANG Wenxu2,*()   

  1. 1. School of Physics, University of Electronic Science and Technology of China, Chengdu 611731, China
    2. State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 611731, China
  • Received:2022-08-29 Published:2023-03-05 Online:2022-10-13
  • Contact: ZHANG Wenxu E-mail:xwzhang@uestc.edu.cn.

摘要:

本文采用有限元电磁仿真设计了基于开路谐振环的微带线谐振器,并利用该谐振器搭建了电子自旋共振测试系统.该谐振器的3 dB带宽为58.7 MHz,且具有开放式的平面结构.对不同质量的二苯基三硝基苯肼(DPPH)样品测试结果显示本系统的室温自旋探测灵敏度可以达到9.66×1012 spins/Gs Hz1/2;对以微晶玻璃和硅片为基底的DPPH样品测试结果表明本系统能实现对大尺寸、高损耗样品的电子自旋共振信号的非破坏性测量.本系统为薄膜材料的缺陷研究以及相关的微波性能表征提供了便捷的手段.

关键词: 双开口环谐振器, 介电损耗, 薄膜, 电子自旋共振

Abstract:

In this paper, a microstrip resonator based on double split rings is used to build an electron spin resonance (ESR) measurement system. The resonator is optimized by the finite element electromagnetic simulation and the 3 dB bandwidth is 58.7 MHz. Due to the open structure of the resonator, large-size samples with high dielectric loss can be measured nondestructively. The ESR signal of 2,2-diphenyl-1-picrylhydrazyl (DPPH) powder with different quality is measured at room temperature, and the result indicated that the spin detection limit of this system can reach 9.66 ×1012 spins/Gs Hz1/2. It is demonstrated that the system can be used to characterize films deposited on different substrates such as silicon, glasses or ceramics regardless of its high frequency losses through the measurement of DPPH sample spin-coated on silicon and zerodur. Our system provides a convenient approach to research the defect of thin films and to characterize their performances within microwave frequency.

Key words: double split ring resonator, dielectric loss, thin film, electron spin resonance

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